Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665050 | Projection exposure methods using difracted light with increased intensity portions spaced from the optical axis | — | 2003-12-16 |
| 6653024 | Photomask, aberration correction plate, exposure apparatus, and process of production of microdevice | Hitoshi Takeuchi, Soichi Owa | 2003-11-25 |
| 6636293 | Exposure method and apparatus having a decreased light intensity distribution | — | 2003-10-21 |
| 6627365 | Photomask and projection exposure apparatus | — | 2003-09-30 |
| 6582978 | Position detection mark and position detection method | — | 2003-06-24 |
| 6538740 | Adjusting method for position detecting apparatus | Nobutaka Magome | 2003-03-25 |