MS

Michael Sogard

NI Nikon: 2 patents #50 of 325Top 20%
📍 Menlo Park, CA: #62 of 354 inventorsTop 20%
🗺 California: #4,287 of 28,521 inventorsTop 20%
Overall (2003): #50,983 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6628503 Gas cooled electrostatic pin chuck for vacuum applications — 2003-09-30
6529260 Lifting support assembly for an exposure apparatus — 2003-03-04