MO

Masashi Okada

NI Nikon: 2 patents #50 of 325Top 20%
Overall (2003): #53,110 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6637273 Methods and apparatus for measuring stress of membrane regions of segmented microlithographic mask blanks — 2003-10-28
6563570 Apparatus for evaluating a sample including a self-supporting thin film — 2003-05-13