Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646719 | Support assembly for an exposure apparatus | Bausan Yuan, Yutaka Hayashi | 2003-11-11 |
| 6590639 | Active vibration isolation system having pressure control | Bausan Yuan, Michael Binnard | 2003-07-08 |