Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606146 | Stage device, exposure apparatus incorporating the stage device, and method of using the same | — | 2003-08-12 |
| 6509953 | Apparatus for exposing a pattern onto an object with controlled scanning | Bausan Yuan | 2003-01-21 |