Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666611 | Three degree of freedom joint | Alton H. Phillips | 2003-12-23 |
| 6648509 | Friction-drive stage | — | 2003-11-18 |
| 6639654 | Wafer stage carrier and removal assembly | Michael Binnard | 2003-10-28 |
| 6600547 | Sliding seal | Alton H. Phillips | 2003-07-29 |