Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593997 | Stage assembly including a reaction assembly | Doug Watson, Mike Binnard | 2003-07-15 |
| 6570273 | Electric linear motor | — | 2003-05-27 |
| 6555936 | Flatmotor device and exposure device | Keiichi Tanaka | 2003-04-29 |
| 6551045 | Wafer stage chamber | Michael Binnard | 2003-04-22 |