Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6631062 | Electrically conductive ceramic material, a process of producing same, and an electrostatic chuck | Hiroyuki Matsuo, Sari Endoh, Yukio Kishi, Kazunori Saitoh, Hiroshi Suzuki +5 more | 2003-10-07 |