Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6535371 | Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly | Takashi Kayamoto, Toshihiko Hanamachi, Tadashi Inokuchi | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6535371 | Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly | Takashi Kayamoto, Toshihiko Hanamachi, Tadashi Inokuchi | 2003-03-18 |