Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653603 | Heaters | — | 2003-11-25 |
| 6645304 | Susceptors for semiconductor-producing apparatuses | — | 2003-11-11 |
| 6558158 | Ceramic heater | — | 2003-05-06 |
| 6518162 | Method for manufacturing a semiconductor device | Atsushi Ono, Takuro Asazu | 2003-02-11 |