Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636413 | Electrostatic chucks and process for producing the same | — | 2003-10-21 |
| 6617514 | Ceramics joint structure and method of producing the same | Ryusuke Ushikoshi, Tomoyuki Fujii | 2003-09-09 |
| 6608745 | Electrostatic chunks | Kazuaki Yamaguchi | 2003-08-19 |