Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506306 | Method and an apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication | Jürgen Hammer, Andre Richter, Heinz-Dieter Petermann | 2003-01-14 |