Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607978 | Method of making a semiconductor device with alloy film between barrier metal and interconnect | — | 2003-08-19 |
| 6573607 | Semiconductor device and manufacturing method thereof | Nobukazu Ito | 2003-06-03 |
| 6555911 | Semiconductor device and method of manufacturing interconnections thereof using copper and tungsten in predetermined ratios | Toshiyuki Takewaki, Manabu Iguchi | 2003-04-29 |
| 6514853 | Semiconductor device and a manufacturing process therefor | — | 2003-02-04 |