YI

Yoko Iwabuchi

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #87,083 of 273,478Top 35%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6531409 Fluorine containing carbon film and method for depositing same — 2003-03-11