Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638141 | Method and apparatus for chemical-mechanical polishing | — | 2003-10-28 |
| 6536455 | Diffusion reactor with sloped bottom plate suitable for cleaning the same | — | 2003-03-25 |
| 6506256 | Method and apparatus for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity | — | 2003-01-14 |