Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663715 | Plasma CVD apparatus for large area CVD film | Manabu Ikemoto | 2003-12-16 |
| 6537911 | Chemical vapor deposition method | Sang-Tae Ko | 2003-03-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663715 | Plasma CVD apparatus for large area CVD film | Manabu Ikemoto | 2003-12-16 |
| 6537911 | Chemical vapor deposition method | Sang-Tae Ko | 2003-03-25 |