Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569766 | Method for forming a silicide of metal with a high melting point in a semiconductor device | Nobuaki Hamanaka, Ken Inoue | 2003-05-27 |
| 6566254 | Method for forming a silicide film on gate electrodes and diffusion layers of MOS transistors | — | 2003-05-20 |
| 6548421 | Method for forming a refractory-metal-silicide layer in a semiconductor device | Nobuaki Hamanaka, Ken Inoue | 2003-04-15 |