Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627473 | Compound semiconductor device with delta doped layer under etching stopper layer for decreasing resistance between active layer and ohmic electrode and process of fabrication thereof | Hitoshi Negishi | 2003-09-30 |
| 6514872 | Method of manufacturing a semiconductor device | — | 2003-02-04 |