Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585568 | Chemical mechanical polishing slurry | Tomoko Wake, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-07-01 |
| 6585786 | Slurry for chemical mechanical polishing | Tomoko Wake, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-07-01 |
| 6530968 | Chemical mechanical polishing slurry | Tomoko Wake, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-03-11 |