Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638665 | Method and apparatus for designing EB mask | — | 2003-10-28 |
| 6597001 | Method of electron-beam exposure and mask and electron-beam exposure system used therein | Hiroshi Yamashita | 2003-07-22 |