Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556876 | Hybrid fuzzy closed-loop sub-micron critical dimension control in wafer manufacturing | Hank Prosack, Kenneth Swan | 2003-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556876 | Hybrid fuzzy closed-loop sub-micron critical dimension control in wafer manufacturing | Hank Prosack, Kenneth Swan | 2003-04-29 |