Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605548 | Process for etching gallium nitride compound based semiconductors | — | 2003-08-12 |
| 6599361 | GaN selective growth on SiC substrates by ammonia-source MBE | Haipeng Tang, James Webb | 2003-07-29 |