Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649434 | Method of manufacturing semiconductor device having ZnO based oxide semiconductor layer | Paul Fons, Koji Matsubara, Akimasa Yamada, Shigeru Niki, Ken Nakahara | 2003-11-18 |
| 6638846 | Method of growing p-type ZnO based oxide semiconductor layer and method of manufacturing semiconductor light emitting device | Paul Fons, Koji Matsubara, Akimasa Yamada, Shigeru Niki, Ken Nakahara | 2003-10-28 |
| 6566162 | Method of producing Cu (In, Ga) (Se, S) 2 semiconductor film | Akimasa Yamada, Shigeru Niki, Paul Fons | 2003-05-20 |
| 6531408 | Method for growing ZnO based oxide semiconductor layer and method for manufacturing semiconductor light emitting device using the same | Paul Fons, Akimasa Yamada, Koji Matsubara, Shigeru Niki, Ken Nakahara | 2003-03-11 |