Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635967 | Air gap semiconductor structure and method of manufacture | Ting-Chang Chang, Yi-Shien Mor | 2003-10-21 |
| 6583067 | Method of avoiding dielectric layer deterioration with a low dielectric constant | Ting-Chang Chang, Yi-Shien Mor | 2003-06-24 |
| 6521547 | Method of repairing a low dielectric constant material layer | Ting-Chang Chang, Yi-Shien Mor | 2003-02-18 |