Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551875 | Method of forming a uniform collar oxide layer over an upper portion of a sidewall of a trench extending into a semiconductor substrate | — | 2003-04-22 |
| 6537872 | Method of fabricating a DRAM cell capacitor | Chih-Han Chang | 2003-03-25 |