Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518148 | Method for protecting STI structures with low etching rate liners | Kern-Huat Ang, Chun-Hung Peng | 2003-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518148 | Method for protecting STI structures with low etching rate liners | Kern-Huat Ang, Chun-Hung Peng | 2003-02-11 |