Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665070 | Alignment of a rotatable polarizer with a sample | Pablo I. Rovira | 2003-12-16 |
| 6522406 | Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer | Pablo I. Rovira, James M. Holden, Roger R. Lowe-Webb | 2003-02-18 |