Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617245 | Etching mask, process for forming contact holes using same, and semiconductor device made by the process | — | 2003-09-09 |
| 6569776 | Method of removing silicon nitride film formed on a surface of a material with a process gas containing a higher-order fluorocarbon in combination with a lower-order fluorocarbon | — | 2003-05-27 |
| 6562721 | Dry etching method and method of manufacturing semiconductor device | — | 2003-05-13 |
| 6559486 | Etching mask, process for forming contact holes using same, and semiconductor device made by the process | — | 2003-05-06 |