Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625855 | Method for producing surface acoustic wave device | Yasuji Yamamoto, Toshimaro Yoneda, Michio Kadota | 2003-09-30 |
| 6592729 | In-line sputtering apparatus | Kazunori Shimoda, Michio Kadota, Ken Funato | 2003-07-15 |
| 6564439 | Method and manufacturing a surface acoustic wave element | Yasuji Yamamoto, Toshimaro Yoneda, Michio Kadota | 2003-05-20 |