Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592434 | Wafer carrier and method of material removal from a semiconductor wafer | James Grootegoed, Laura John | 2003-07-15 |
| 6592708 | Filter apparatus and method therefor | — | 2003-07-15 |
| 6572462 | Carrier assembly for chemical mechanical planarization systems and method | — | 2003-06-03 |
| 6514126 | Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor | — | 2003-02-04 |