Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630696 | Silica zeolite low-k dielectric thin films | Yushan Yan, Zhengbao Wang | 2003-10-07 |
| 6573131 | Silica zeolite low-k dielectric thin films and methods for their production | Yushan Yan, Zhengbao Wang | 2003-06-03 |