Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664497 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-12-16 |
| 6559408 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-05-06 |
| 6552296 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-04-22 |