Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627464 | Adaptive plasma characterization system | — | 2003-09-30 |
| 6608446 | Method and apparatus for radio frequency (RF) metrology | — | 2003-08-19 |
| 6559650 | RF power probe head with a thermally conductive bushing | — | 2003-05-06 |
| 6522121 | Broadband design of a probe analysis system | — | 2003-02-18 |