Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662145 | Method, equipment, and recording medium for controlling exposure accuracy | — | 2003-12-09 |
| 6553137 | METHOD OF INCREASING OVERLAY ACCURACY IN AN EXPOSURE STEP AND OVERLAY DISPLACEMENT MEASURING DEVICE FOR DETERMINING OPTIMUM MEASUREMENT FOCUS PLANE BY VARIATION IN MAGNITUDES OF DISPLACEMENT OF TWO OVERLAY INSPECTION MARKS | — | 2003-04-22 |