Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648976 | Apparatus and method for plasma processing | Izuru Matsuda, Hideo Haraguchi, Takuya Matsui | 2003-11-18 |
| 6642533 | Substrate detecting method and device | Hideo Haraguchi, Izuru Matsuda | 2003-11-04 |