Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616773 | Substrate treatment method | Masaki Kuzumoto, Izumi Oya, Makoto Miyamoto, Hideo Horibe, Tatsuo Kataoka +1 more | 2003-09-09 |
| 6517998 | Method for removing photoresist film and apparatus used therefor | Masaki Kuzumoto, Izumi Oya, Makoto Miyamoto | 2003-02-11 |
| 6517999 | Method of removing photoresist film | Izumi Oya, Makoto Miyamoto, Masaki Kuzumoto, Masashi Ohmori, Tatsuo Kataoka | 2003-02-11 |