Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555790 | Semiconductor manufacturing apparatus, method for cleaning the semiconductor manufacturing apparatus, and light source unit | Yoshiharu Ono, Yuko Odamura | 2003-04-29 |
| 6509251 | Method of forming a resist pattern for blocking implantation of an impurity into a semiconductor substrate | Takayuki Saito | 2003-01-21 |