Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551921 | Method of polishing a stack of dielectric layers including a fluorine containing silicon oxide layer | Kinya Goto | 2003-04-22 |
| 6509648 | Method of manufacturing semiconductor device and semiconductor device | Noboru Morimoto, Kinya Goto | 2003-01-21 |