Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620557 | Photo-mask, photo-mask pair, semiconductor device and method of manufacturing a semiconductor device | Masayoshi Mori | 2003-09-16 |
| 6537709 | Photo mask having film formed from halftone material, method of manufacturing photo mask, and method of manufacturing semiconductor device | Kouji Tange | 2003-03-25 |
| 6503852 | Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device | Satoshi Aoyama | 2003-01-07 |