Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639232 | Pattern writing method employing electron beam writing device of variable-shaped vector scan system | — | 2003-10-28 |
| 6511792 | Developing process, process for forming pattern and process for preparing semiconductor device using same | Atsuko Fujino, Teruhiko Kumada, Atsushi Oshida, Hitoshi Fukuma | 2003-01-28 |