Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617191 | Method for anodizing silicon substrates for surface type acceleration sensors | Makoto Murate | 2003-09-09 |
| 6539804 | Two-axis yaw rate sensor | — | 2003-04-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617191 | Method for anodizing silicon substrates for surface type acceleration sensors | Makoto Murate | 2003-09-09 |
| 6539804 | Two-axis yaw rate sensor | — | 2003-04-01 |