HS

Hideo Saeki

HC Hitachi Tokyo Electronics Co.: 1 patents #1 of 18Top 6%
Overall (2003): #210,892 of 273,478Top 80%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6664549 Wafer chuck, exposure system, and method of manufacturing semiconductor device Seiichiro Kobayashi, Koichi Koyanagi, Teruo Honda, Masaharu Motohashi 2003-12-16