Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528436 | Method of forming silicon nitride layer directly on HSG polysilicon | Scott DeBoer, Klaus Schuegraf, Randhir P. S. Thakur | 2003-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528436 | Method of forming silicon nitride layer directly on HSG polysilicon | Scott DeBoer, Klaus Schuegraf, Randhir P. S. Thakur | 2003-03-04 |