Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653243 | Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates | — | 2003-11-25 |
| 6645874 | Delivery of dissolved ozone | Kevin J. Torek, Jonathan Morgan | 2003-11-11 |
| 6589882 | Copper post-etch cleaning process | Michael T. Andreas | 2003-07-08 |
| 6541391 | Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates | David M. Smith, Kevin J. Torek | 2003-04-01 |