Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642112 | Non-oxidizing spacer densification method for manufacturing semiconductor devices | Brett D. Lowe, Timothy K. Carns | 2003-11-04 |
| 6573141 | In-situ etch and pre-clean for high quality thin oxides | Bernice L. Kickel | 2003-06-03 |