Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548883 | Reduced RC between adjacent substrate wiring lines | — | 2003-04-15 |
| 6537903 | Processing methods for providing metal-comprising materials within high aspect ratio openings | — | 2003-03-25 |
| 6534408 | Utilization of disappearing silicon hard mask for fabrication of semiconductor structures | Mark E. Jost | 2003-03-18 |