Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635547 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Randhir P. S. Thakur | 2003-10-21 |
| 6613654 | Fabrication of semiconductor devices with transition metal boride films as diffusion barriers | Scott DeBoer | 2003-09-02 |
| 6614082 | Fabrication of semiconductor devices with transition metal boride films as diffusion barriers | Scott DeBoer | 2003-09-02 |
| 6610211 | Method of processing internal surfaces of a chemical vapor deposition reactor | F. Daniel Gealy, Scott DeBoer | 2003-08-26 |
| 6596651 | Method for stabilizing high pressure oxidation of a semiconductor device | F. Daniel Gealy, Scott DeBoer, Dave Chapek, Randhir P. S. Thakur | 2003-07-22 |
| 6518121 | Boride electrodes and barriers for cell dielectrics | Scott DeBoer, Dan Gealy, Randhir P. S. Thakur | 2003-02-11 |