Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632743 | Post-planarization, pre-oxide removal ozone treatment | Tim J. Kennedy, Robert H. Whitney, Gunnar A. Barnhart | 2003-10-14 |
| 6568999 | Method and apparatus for cleaning a surface of a microelectronic substrate | Gunnar A. Barnhart, Greg Green | 2003-05-27 |