Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537910 | Forming metal silicide resistant to subsequent thermal processing | Robert Burke, Farrell M. Good | 2003-03-25 |
| 6534409 | Silicon oxide co-deposition/etching process | — | 2003-03-18 |
| 6509627 | Flowable germanium doped silicate glass for use as a spacer oxide | — | 2003-01-21 |