Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617538 | Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements | — | 2003-09-09 |
| 6544339 | Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processing | — | 2003-04-08 |
| 6530994 | Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing | — | 2003-03-11 |